T3.3: Substrate/wave environmental - temperature - sensitivity [M15-M27]

POI was developed for addressing several standard SAW flaws, among which environmental and more specifically temperature sensitivity plays a major role. Linear (1st order) temperature coefficient of frequency (TCF) characterizing filter frequency drift vs thermal operating conditions have been measured for shear waves on POI as small as 10ppm.K-1, to be compared with the min -20ppm.K-1 of BAW filters and -35ppm.K -1 of standard SAW filters. The idea here is to fix operating points and configurations for which even better TCF can be reached, typically smaller than 10ppm.K -1 and as close as possible to a 0ppm.K -1 linear sensitivity. In this task, the TCF of the substrates previously prepared in task T3.2 will be evaluated by using the appropriate testing structures (incorporated in previous task) For this task, SOI will provide filters on the various tested substrates according to WP2, T2.2 and T2.4, to INC for characterization. The test vehicles will be gradually heated from room temperature up to 300°C and the corresponding output response will be monitored. The TCF will be determined from the output response of theses test structures and the main operating points and configurations for which TCF is minimized for these low-losses alternative substrates will be reported.