T2.3: Initial design filter fabrication [M09-M12]

This task is dedicated to a first manufacturing of filters according the initial design step on the first set of POI wafers ordered in T2.1. This sub-task will be completed with the delivery of updated FoM online with the devices to be developed in the project. The filters are fully characterized at the end of the front-end operation, including the frequency temperature dependence. For each type of filter, 5 wafers will be used for this step: 2 wafers are used for process optimization and 3 wafers are dedicated to effective test device manufacturing and characterization. Critical dimensions are systematically measured, providing statistics allowing for the process qualification. RF Tip-probing measurements of the devices are achieved, yielding statistics as well to electrically qualify the corresponding runs.
All test devices are measured according tasks T2.1 and WP3-T3.1analysis and data are delivered to the partners to allow for feedback analyses and FoM extraction. All sensitive parameters or wave characteristics required for the design optimization are evaluated and recorded to be shared within the project partners and to feed task T2.4. Furthermore, complementary tests will be achieved by INC particularly concerning power handling. SOI will provide filter test vehicles in that pursuit.