T2.5: Project Bare demonstrator Manufacturing [M15-M24]

This task is devoted to the front-end fabrication of the project final filter demonstrators. At the end of the sub-task, filters are produced, characterized at front-end level and delivered to the partners for completing their respective tasks and more particularly the packaging activities.
All the project development results are applied to produce the best devices on the selected POI wafers. Several wafers (5 min for each type of filter) are produced and systematically characterized to first validate the filter function at the end of the front-end process and second to estimate the yield of the fabrication process. The temperature stability of the filter is measured as well as the specific parameters to be characterized for partners. Here again, the data are shared with all partners to feed the process analysis. According results, several devices are diced (min 20 per type of filter) and provided either to TAS or to the packaging sub-contractor to address task T2.6 challenges, accounting for standard rules of qualification of such products (see ESCC 2263502).